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MEMS and Microsystems
Design, Manufacture, and Nanoscale
Engineering (2nd Edition)*
SOLUTION MANUAL
Tai-Ran Hsu, Professor**
Department of Mechanical and Aerospace Engineering
San Jose State University
San Jose, CA 95192-0087
USA
Contents
Chapter 1 Overview of MEMS and Microsystems 3
Chapter 2 Working Principles of Microsystems 3
Chapter 3 Engineering Science for Microsystems Design
and Fabrication 9
Chapter 4 Engineering Mechanics for Microsystems Design 12
Chapter 5 Thermofluid Engineering and Microsystems Design 27
Chapter 6 Scaling Laws in Miniaturization 36
Chapter 7 Materials for MEMS and Microsystems 36
Chapter 8 Microsystems Fabrication Processes 41
Chapter 9 Overview of Micromanufacturing 50
Chapter 10 Microsystems Design 51
Chapter 11 Assembly, Packaging, and Testing of Microsystems 52
Chapter 12 Introduction to Nanoscale Engineering 55

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MEMS and Microsystems Design, Manufacture, and Nanoscale Engineering (2nd Edition)*

SOLUTION MANUAL
Tai-Ran Hsu, Professor** Department of Mechanical and Aerospace Engineering San Jose State University San Jose, CA 95192-0087 USA

August 15, 2008 _____________________________________ * John Wiley & Sons, Inc., Hoboken, New Jersey, USA ⓒ2008, ISBN 978-0-470-08301-7 ** Telephone: (408)924-3905; Fax: (408)924-3995 E-mail: tairan@email.sjsu.edu

1

Contents

Chapter 1 Chapter 2 Chapter 3

Overview of MEMS and Microsystems Working Principles of Microsystems Engineering Science for Microsystems Design and Fabrication Engineering Mechanics for Microsystems Design Thermofluid Engineering and Microsystems Design Scaling Laws in Miniaturization Materials for MEMS and Microsystems Microsystems Fabrication Processes Overview of Micromanufacturing

3 3

9 12 27 36 36 41 50 51 52 55

Chapter 4 Chapter 5 Chapter 6 Chapter 7 Chapter 8 Chapter 9

Chapter 10 Microsystems Design Ch

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Mems and Microsystem 2판 솔루션 (Mems And microsystem 2nd , Tai ran hsu (wiley)

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